XacTorr® Series

XacTorr® Series Capacitance Manometers

Minimize drift and thermal effects. Maximize vacuum process results.

Models CMX0 / CMX1 / CMX2 / CMX3

Maximize the efficiency and performance of your vacuum-dependent processes: Choose XacTorr® Series digital vacuum capacitance manometers from Brooks Instrument. XacTorr® Series devices incorporate industry-leading features that improve measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects.

The advanced Mark-IV sensor contains surface areas not used in pressure measurement – providing locations for particles and condensable vapors to accumulate. This reduces the need to re-zero the gauge and increases sensor life without risking sensor drift. Additionally, an optional fast response sensor is available for superior closed loop control performance.

The result: ultra-accurate, repeatable and efficient vacuum measurement that ensures each time you evacuate a chamber, it reaches the precise Torr your process requires for clean, contaminant-free production.

Features

Available for process ranges from 0.10 Torr to 1000 Torr
Multiple accuracy levels available
Patented Mark IV sensor
Digital architecture enables operation over a wide dynamic range with extremely good accuracy
Dual-zone temperature control improves measurement stability and repeatability
Multi-decade digital calibration provides superior window of known accuracy
Intelli-touch zero adjustment
Independent & easily accessible diagnostic service port
DeviceNet® and analog communication options

Benefits

Lower drift, superior protection from deposition of process gases
Elimination of manual potentiometers and drift associated with electronics
Fast warm-up, close temperature control, rapid response to changes
Multi-decade calibration provides superior window of known accuracy, real-time compensation of ambient temperature effects
Cannot be zeroed if pressure is too high or desired temperature not reached
Diagnostic port allows monitoring and data acquisition simultaneously with device operation for chamber and tool matching along with “real time” advanced troubleshooting

Applications

Semiconductor fabrication
Thin-film deposition processes – glass, web and optical coatings
Freeze drying perishable materials
High-tech coatings for medical instruments (surgical instruments, dental drills, etc.)

Specifications

Performance Mechanical Certifications/Approvals Electrical

Product Type	Capacitance Manometer
Differentiator	Heated or Unheated Analog or Digital
Temperature	CMX0 Ambient CMX1 45°C CMX2 100°C CMX3 160°C
Pressure Range	0.1, 1, 2, 10, 20, 100, 1000 Torr mBar & Pascal References Available
Accuracy	CMX0: 0.25% of Reading CMX1, CMX2: 1 to 1000 Torr Ranges = 0.15% of Reading CMX1, CMX2: < 1 Torr Ranges = 0.25% of Reading
Measurement Range	4 Decades
Temperature Effect	On Zero 0.002% FS / °COn Span 0.02% FS / °C
Exposed Materials	Inconel® and/or AISI 316L Stainless Steel
Over Pressure Limit	17 psia or 125% of Full Scale, whichever is greater
EMC	Fully CE Certified to EMC Directive 89/336/EEC
Power Supply / Consumption	CMX0 power required is 200 mA @ ±15 Vdc Power Input at Initial Warm-up Analog Models, Typical Values1: CMX1 – 270 mA@±15 Vdc (±5%); CMX2 – 620 mA @ ± 15 Vdc (±5%) Power Input at Steady State Analog Models, Typical Values1:CMX1 – 175 mA @ ±15 Vdc (±5%); CMX2 – 350 mA @ ± 15 Vdc (±5%) Power Input at Initial Warm-up DeviceNet Models, Typical Values: CMX1 – 400 mA @ 24 Vdc; CMX2 – 900 mA @ 24 Vdc Power Input at Steady State DeviceNet Models, Typical Values: CMX1 – 300 mA @ 24 Vdc CMX2 – 600 mA @ 24 Vdc 1.15-Pin Male Sub D Model requires an additional 40 mA to power the internal relays (if energized).
Electrical Connection	Analog/RS485 via 9-Pin or 15-Pin “D” connector DeviceNet™ via 5-Pin “M12” connector Various cable adaptors available. See product data sheet for more information.
Digital Communication	DeviceNet™ RS485
Analog Communication	0-10 Vdc 5k Ohm load
Size	Large

BCN (+34) 93 864 68 43

MAD (+34) 91 864 6843

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