VDM300 DI Water Vapor Delivery Module

Highest flow accuracy for ultra-high purity deionized (DI) water vapor delivery.

Models VDM300

The Vapor Delivery Module (VDM) from Brooks Instrument is a high-performance, self-contained module for the highly accurate delivery of ultra-high purity deionized (DI) water vapor. It features a power efficient design that enables low temperature, ultra-high purity vapor generation. It utilizes a proven vapor delivery technique and combines it with advanced digital control and integrated diagnostic features in a small, convenient package.

Designed for advanced strip and post metal etch passivation processes, the VDM delivers improved accuracy, higher flow rates, wider control range and lower power consumption compared to flash evaporation systems. Based on proven thermal mass flow measurement techniques, the VDM produces vapor in a non-super-heated vapor state, reducing the aggressive effects of deionized water, for improved reliability and cleaner operation.

The VDM offers user-friendly data logging and diagnostic features via an independent service port and an intuitive graphic user interface.

Features

Flow range: 3 slpm (DIW vapor)
Direct water vapor measurement with superior flow accuracy
Connects directly to the house deionized water supply
Operates at lower temperatures (non-superheated state)
Optimized design for flushing and draining
EtherCAT digital communications
Brooks Expert Support Tool (BEST) graphical user interface

Benefits

Utilizes proven, reliable thermal mass flow measurement and control technique
Highly tolerant of varying fab DI water supply pressure
Improved corrosion resistance in wetted path
Ensures cleaner operation
Tool interface using analog or digital communications
Direct user interface for enhanced data collection or troubleshooting

Applications

Silicon semiconductor post-metal etch process
Silicon semiconductor metal strip process
Ultra-high purity humidification in sub-atmospheric environments

Specifications

Electrical

Ratings Compliance

Product Type	DI Water Vapor Delivery Module
Differentiator	Ultra High Purity DIW Vapor Highest Flow Accuracy Compact Design EtherCAT interface
Vaporization Method	Vapor Draw
Fluid Type	UHP DI Water
Flow Range (Full Scale Capacity)	3000 sccm
Turndown Ratio	20:1
Response Time	<2 sec
Accuracy	±1% SP @ >10% FS ±0.2% FS @ 5 – 10% FS
Linearity	±0.5% of FS
Repeatability	<±0.2% FS
Flow Temperature Coefficient	0.05% per °C zero and span
Valve Shut Down	Normally Closed Valve: <0.5% FS
Analog Communication	0 to 5-24 Vdc
Digital Communication	EtherCAT via dual RJ-45 jacks Diagnostic (RS485) via microUSB
Electrical Connection	208-230 Vac, 50/60 Hz, 290 Watts Nominal (tank heater) ± 15 Vdc, ± 5% @ 1.2 amp (MFC heater and PCBA)
Status Lights	Zero Device Ready Warm Up Device Fault ECAT Error EtherCAT Run EtherCAT Link Active
Diagnostic / Service Port	RS-485 via microUSB
Fittings	Outlet Vapor: 1/2″ Female VCR Inlet DI Water: 1/4″ Male VCR or Tube Compression DI Water Drain: 1/8″ Instant Tube Fitting
Mounting Orientation	Vertical with DIW inlet fittings down
Max Pressure	Vapor Outlet: 200 torr
Supply Pressure	DI Water: 10 – 40 psig N₂ Purge: 10 – 40 psig
Ambient Temperature Range	15 – 45°C
Internal Volume	0 to 95% RH, non-condensing
EMC	Electromagnetic Compatibility (EMC): Fully Compliant to Directive 2004/108/EC (EN: 61326-1:2013) Low Voltage Directive (LVD): Fully Compliant to Directive 2006/95/EC (EN: 61010-1:2010)
Environmental Compliance	RoHS Directive (2011/65/EU) REACH Directive EC 1907/2006 SEMI E54.20-1108: Standard for Sensor/Actuator Network Communication for EtherCAT®

BCN (+34) 93 864 68 43

MAD (+34) 91 864 6843

Unit converter

Unit converter

VDM300 DI Water Vapor Delivery Module