PC100 Series

PC100 Series Metal Sealed Pressure Controllers

Accuracy under pressure. Precision under control.

Models PC115 / PC125

The PC100 Series pressure controllers and meters combine a host of high-performance technology features to deliver a new level of pressure control accuracy and reliability to demanding semiconductor, vapor deposition and other ultra-precise manufacturing processes.

Built on the proven Brooks GF100 mass flow controller technology, the PC100 Series features a high-purity all-metal flow path, enhanced sensor technology engineered specifically to eliminate sensor drift and a user interface and device diagnostics capability that makes it much easier to conduct device evaluation and troubleshooting, resulting in limited service interruption and reduced downtime.

Features

Response time: <1 second
Full-scale flow rates up to 10 slm
Transducer pressure range: 1000 Torr FS
All-metal seal flow path: 5µ inch Ra surface finish
PC125 with embedded flow meter includes a highly corrosion-resistant Hastelloy® C-22 flow sensor combined with high-speed ARM processor
Fast-acting diaphragm-free valve assembly
High-visibility LCD display with easily accessible push button for local indication of flow, temperature and network address
Independent diagnostic/service port
DeviceNet™ protocol

Benefits

High-performance components enable fast response and setting time for improved pressure control
Reduced diverted gas consumption and associated abatement costs
All metal, corrosion resistant SEMI F20 compliant wetted flow path with overall reduced surface area and un-swept volumes ensures faster dry-down during purge steps
Long-term thermal or pressure sensor device stability maximizes yield and throughput
User-programmable start-up function for processes requiring a slow-ramped pressure control

Applications

Semiconductor advanced etch tools
Thin-film chemical vapor deposition systems (CVD, MOCVD, PECVD, ALD)
Physical vapor deposition (PVD) systems

Specifications

Performance Mechanical Electrical Compliance

Flow Range (Full Scale Capacity)	10 slm (N2 or H2 only)
Differentiator	Control Mode: Downstream or Upstream Ultra-High Purity Digital Pressure Control
Product Type	Pressure Controller
Accuracy	Pressure Reading: ± 1% of reading Pressure Control: ± 0.2% of F.S. <10% F.S.; ± 1% of reading >10% to 100% F.S. Flow Reading: ± 0.35% of F.S. 2-35% F.S. ; ± 1% of reading >35% F.S
Repeatability	< ±0.2% F.S.
Flow Temperature Coefficient	Zero: < 0.05% F.S./°C Span: < 0.08% of reading/°C
Max Pressure	1000 Torr FS
Pressure Control Range	> 2 to 100%
Response Time	< 1 sec typ. (excluding system time constant)
Temperature Range	10 – 50°C
Leak Integrity	External: 1 x 10^-10atm scc/sec He max
Seal Material	Metal
Level of Purity / Surface Finish	5 µ inch Ra
Wetted Materials	SEMI F20 HP Compliant 316L VIM/VAR Hastelloy C-22 316L Stainless Steel 304 Stainless Steel
Valve Options	Normally Closed
Environmental Compliance	RoHS Directive (2011/65/EU) REACH Directive EC 1907/2006
EMC	EC Directive 2014/30/EU CE: EN61326-1: 2013
Power Supply / Consumption	DeviceNet™: 545 mA max @ +11-25 Vdc
Electrical Connection	DeviceNet™ via 5-Pin “M12” Connector
Digital Communication	DeviceNet™
Analog Communication	—
Diagnostic Capability	Available

BCN (+34) 93 864 68 43

MAD (+34) 91 864 6843

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