GF80 Series

GF80 Series Metal Sealed Thermal Mass Flow Controllers & Meters

Raises the standard in performance for value-driven metal sealed applications.

Models GF80

For many industrial and semiconductor processes, both performance and cost efficiency are crucial. The GF80 Series metal sealed mass flow controllers and meters deliver both: Engineered using the same fast response sensor and patented 4th generation MultiFlo™ technology as our best-selling GF100 series, it’s the right choice for operations that need high performance at a value price point. Moving to a metal sealed MFC brings the full benefit of MultiFloTM multi-gas/multi-range capability since there are no limitations in gases that can be used, enhanced purity of the gas due to elimination of oxygen permeation through elastomers, and a reduction in maintenance since metal seals will last indefinitely.

Features

Long-term zero stability of <±0.5% full scale per year
<1 second settling times
Full-scale flow rates up to 300 slpm
All-metal seal flow path – 16µ inch Ra surface finish
Corrosion-resistant Hastelloy® sensor can operate at lower temperatures for gases prone to thermal decomposition
Programmable MultiFlo^TM capability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
Best-in-class temperature coefficient specification through active temperature compensation
Embedded self-test routines and independent diagnostic/service port
Slimline body with VCR fittings
DeviceNet^TM, Profibus®, RS-485 and analog interfaces

Benefits

Fast <1 second flow settling time eliminates wasted gas and process variability
No elastomer seals that can have oxygen permeation, requiring replacement over time
MultiFlo^TM simplifies and streamlines changing process gases — no more removing and calibrating MFCs
New gases and/or ranges can be set in under 60 seconds
Measurement accuracy not affected by temperature variations
Convenient access to diagnostics port for maximum uptime
Compact size eases integration into tight machine spaces; excellent choice for retrofits
Multi-protocol communication interface simplifies integration into existing systems

Key Applications

Cost efficient retrofit/upgrade of legacy MFCs in refurbished semiconductor process tools
Reduce MFC inventory in six-inch/eight-inch semiconductor fabs
MOCVD for LED and power device manufacturing
Solar/thin film chemical vapor deposition (CVD) systems
Analytical OEM equipment

Specifications

Mechanical Ratings Diagnostics & Display Electrical Compliance

Product Type	Mass Flow Controller
Differentiator	High Purity
Performance
Flow Range (Full Scale Capacity)	3 sccm – 300 slm
Accuracy	±1% S.P. 35-100% ±0.35% F.S. < 5-35%
Repeatability	< ±0.2% S.P.
Linearity	±0.5% F.S. (included in accuracy)
Response Time	Normally Closed Valve: <1 sec
Multi-Gas & Range Configurability	MultiFlo™ Available
Pressure Transient Insensitivity	–
Control Range	< 5% – 100%
Number of Bins	Standard GF Series: 11 bins High Flow GF Series: 4 bins
Valve Shut Down	Standard GF Series: < 1% F.S. High Flow GF Series: < 4% of Standard Configuration F.S. @ 30psig/atm out N2 equiv.
Zero Stability	< ±0.5% F.S. per year
Seal Material	Metal
Wetted Materials	316 Stainless Steel Hastelloy C-22 17-7 PH 430SS KM-45
Valve Options	Normally Closed Meter (no valve)
Max Temperature	50^oC
Differential Pressure Range	3-860 sccm = 7-45 psid 861-7200 sccm = 15-45 psid 7201-50000 sccm = 25-45 psid 51-300 slm = 30-90 psid (typical pressure drops
Max Pressure	Standard GF Series: 150 psig (10 bar) High Flow GF Series: Meter = 75 psig (5 bar), Controller = 150 psig (10 bar)
Leak Integrity	1×10^-10 atm cc/sec He
Diagnostic Capability	Available
Status Lights	MFC Health, Network Status
Alarms	Control Valve Output, Network Interruption
Diagnostic / Service Port	RS485 via 2.5mm jack (all models)
Analog Communication	0-20 mA 4-20 mA 0-5 Vdc 0-10 Vdc
Digital Communication	DeviceNet™ Profibus® RS485 S-Protocol RS485 L-Protocol RS485 A-Protocol (GF081)
Electrical Connection	Profibus/Analog via 9-Pin “D” connector RS485/Analog via 9-Pin”D” connector, 15-Pin “D” connector DeviceNet™ via 5-Pin “M12” connector
Power Supply / Consumption	Standard GF Series: RS485 from +12 Vdc to +24 Vdc = 7 Watts max Profibus from +13.5 Vdc to +27 Vdc = 7 Watts max DeviceNet™ from +11 Vdc to +25 Vdc = 13.6 Watts max High Flow GF Series: RS485 from +12 Vdc to +24 Vdc = 3.3 Watts max Profibus from +13.5 Vdc to +27 Vdc = 3.3 Watts max DeviceNet™ from +11 Vdc to +25 Vdc = 3.3 Watts max
Environmental Compliance	Safety EN61010-1 RoHS
EMC	CE: EN6126: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

BCN (+34) 93 864 68 43

MAD (+34) 91 864 6843

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