5850EMH Series

5850EMH Series High Temperature Mass Flow Controllers

Proven long-term stability. Ultra-pure performance for high temperature applications.

Models 5850EMH / 5851EMH

Offering state of the art performance in high temperature gas measurement and control, the 5850EMH Series high temperature metal sealed mass flow controller from Brooks Instrument combines the outstanding leak integrity of metal seals with a variety of options allowing maximum application flexibility. The heart of the 5850EMH Series is the highly stable sensor which provides an electrical output signal linear with flow rate. This signal is used for indicating, recording and/or control purposes without the need for an auto-zero circuit.

Features

High leak integrity (less than 10-11 Pa.m3/s (10-10 atm.cc/s) He)
Wide flow range (0.003 – 100 slpm)
High-purity VAR 316L Stainless Steel
Particulate-free
Helium leak check ports
Normally closed valve (normally open valve optional)
Electrically-activated valve override
Low command flow cutoff
TTL compatible “valve off” function

Benefits

Stable, proven product platform
High flow capability up to 100 lpm (N₂ equivalent)
All-metal flow path enhances gas purity and reduces leaks
Easily installed and serviced with analog only input/outputs

Key Applications

Optical Fiber Manufacturing – MCVD, OVD, AVD
Water Vapor Flow Control

Specifications

Performance Ratings Electrical

Product Type	Mass Flow Controller
Linearity	Included in accuracy.
Repeatability	<±0.25% SP
Accuracy	1% of FS
Flow Range (Full Scale Capacity)	100 slm (N₂ equivalent)
Differentiator	Highest Flow Range Proven, reliable technology
Response Time	<3 sec to within 2% of SP (per SEMI E17-91)
Zero Stability
Mechanical
Seal Material	Metal
Level of Purity / Surface Finish	—
Wetted Materials	316L, 316L VAR, & high alloy ferric SS
Valve Options	Normally Open Normally Closed
Max Temperature	105^oC
Differential Pressure Range	50 – 350 kPa (7 – 50 psid)
Max Pressure	1 MPa (145 psi)
Leak Integrity	1×10^-10 atm cc/sec He (1×10^-11 Pa m³ /sec) ±15 Vdc @ 350 mA (max)
Electrical Connection	15-Pin “D” connector
Digital Communication	–
Analog Communication	0-5 Vdc
Diagnostic Capability	–

BCN (+34) 93 864 68 43

MAD (+34) 91 864 6843

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